Fabworx offers an array of robots, robotic components, and chamber components for 300mm, 200mm, and 150mm fabs. With solutions for CVD, PVD, Epi, Etch, and RTPpro
Fabworx offers an array of robots, robotic components, and chamber components for 300mm, 200mm, and 150mm fabs. With solutions for CVD, PVD, Epi, Etch, and RTPpro
Fabworx offers an array of robots, robotic components, and chamber components for 300mm, 200mm, and 150mm fabs. With solutions for CVD, PVD, Epi, Etch, and RTPpro
our solutions for you
From robot arm assemblies to robotic and chamber component upgrades to hub refurbishments, Fabworx offers an array of products and services for 300mm, 200mm, and 150mm CVD, PVD, Epi, Etch, and RTP process groups.
Explore our current products below.
If you would like more information or you don't see a solution to your problem, contact us.
Robots
Fabpro 2.0 and Top Mount Hub Plate
For 300mm and 200mm
The Fabpro 2.0 robot provides significant improvements in lifetime, repeatability, and particle protection over the 300mm and 200mm OEM Producer SE robot. Enhanced blade leveling and Z-axis adjustments, enclosed, precision bearings and components, and substantial weight reduction result in a longer lasting robot with reduced maintenance needs, greater accuracy, and minimized installation time.
The Fabworx Top Mount Hub Plate allows customers to remove the VHP hub assembly from the top of the tool mainframe without needing to crawl underneath the tool, reducing downtime, tool damage, and danger to engineers and technicians. The Top Mount Hub Plate can be used with the Fabpro 2.0 or the OEM Producer robot.
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Designed to replace the 300mm OEM VHP robot, the Fabhp-v 300 robot utilizes precision, pressed-fit bearings to create a tighter and stronger design that reduces bearing wear and eliminates robot droop. The Fabhp-v 300 also incorporates Fabworx's signature particle containment solutions that trap any bearing generated particles in the robot’s joints, preventing those particles from contaminating the chamber, and incorporates Fabworx's banded wrist design with precision bearings.
The Fabhp-v 300 is also available in an RTP version with nickel coating for protection in high temperature and corrosive environments and with easy blade leveling features.
Fabhp-v 300
For 300mm
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The Fabht 300 robot increases accuracy, placement repeatability, and robot lifetime, while reducing robot droop, particle contamination, and side-to-side movement during Epi and RTP processes. The Fabht 300 utilizes pressed-fit bearings, precision-machined components, particle containment designs, and various other improvements to provide substantial upgrades over the OEM robot.
The Fabht 300 allows easier, faster installations and setups due to independent pitch, roll, and Z-axis adjustment capabilities at the hub connection.
Fabht 300
For 300mm
Fabworx’s upgrade to the 200mm OEM VHP robot. Like the Fabhp-v 300, the Fabhp-v utilizes precision, pressed-fit bearings to create a tighter and stronger design that reduces bearing wear and eliminates robot droop. It incorporates Fabworx's signature particle containment solutions to prevent bearing generated particles from contaminating the chamber and incorporates Fabworx's banded wrist design with precision bearings. The Fabhp-v also provides easy blade leveling design features.
Fabhp-v
For 200mm
The Fabhp robot upgrades the OEM 200mm HP robot, reducing bearing wear, eliminating robot droop and associated wafer scratching, and preventing particle contamination. The Fabhp also provides easy end effector leveling adjustments that are made at the wrist for greater accuracy and faster setup and incorporates Fabworx's banded wrist design with precision bearings.
The HP Hub Assembly Upgrade Kit provides an array of improvements to the HP hub bearings and spring spacer that increase hub assembly vertical alignment and stability. The included motor lock assembly eliminates destabilizing motor jumping and twisting. The HP Hub Assembly Upgrade Kit is included with the Fabhp or can be sold separately.
Fabhp and Hub Upgrade Kit
For 200mm
Components
Fabworx offers a series of upgrades to the Endura mainframe that reduce particle generation and increase yield. These include Elbow Hard Stops for the XP robot that prevent wrist—spool adaptor scratching during maintenance, a reengineered Degas Lift Hoop that eliminates hoop warping and associated particle generation, improved SWLL Fins that reduce wafer movement and scratching during pump down, and Chamber A & B and PVD Chamber Lift Pins that eliminate backside wafer scratching.
Endurance Suite
For 300mm
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XP and VHP Wrist
For 300mm and 200mm
Fabworx’s XP and VHP wrists provide unmatched reliability and lifetime over OEM and after-market wrist assemblies on the XP robot and the 300mm and 200mm VHP robot. Incorporating Fabworx’s proven particle containment technologies and utilizing higher quality bearings, the Fabworx XP and VHP wrists are lighter weight, longer lasting, and eliminate wrist generated particle contamination in the tool.
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End Effectors
For 200mm
Fabworx offers an array of upgraded 200mm end effectors that allow customers to substantially increase throughput and decrease wafer scratching. Fabworx end effectors minimize backside wafer contact and are available in versions with machined bumps and versions with replaceable perfluorolastomer O-rings and pads as the sole wafer contact points. These O-rings and pads greatly increase the friction between the wafer and the end effector, allowing customers to increase their robot operating speeds while maintaining or improving wafer placement accuracy and repeatability. Fabworx end effectors are available in a variety of materials such as aluminum 6061, anodized aluminum, and ultra thin molybdenum.
Refurbishments
XP Hub Refurbishment
Fabworx’s XP hub refurbishment service provides incoming inspection, hub disassembly and cleaning, upgraded bearing replacement, reassembly with all new hardware, and outgoing quality control. Fabworx’s upgraded bearings are longer lasting than the OEM bearings and are designed to operate in corrosive and high temperature conditions.
VHP Hub and E-Hub Refurbishment
Fabworx’s 300mm and 200mm VHP hub and E-hub refurbishment service provides incoming inspection, hub disassembly and cleaning, upgraded bearing replacement, reassembly with all new hardware, and outgoing quality control. Fabworx’s upgraded bearings are longer lasting than the OEM bearings and are designed to operate in corrosive and high temperature conditions.
Fabworx also offers hub bearing burn-in after refurbishment is complete.
HP Hub Bearing Refurbishment
Fabworx’s HP hub bearing refurbishment service provides incoming inspection, disassembly and cleaning, upgraded bearing replacement, reassembly with new lubrication, and outgoing quality control. Fabworx’s upgraded bearings are longer lasting than the OEM bearings and are designed to operate in corrosive and high temperature conditions.