Fabhp-v 300

The Fabworx Solutions Fabhp-v 300 for 300mm Endura® and Centura® platforms is designed to dramatically improve reliability, contamination, repeatability/accuracy, and throughput.

The result is higher yield, greater productivity and a rapid return on investment (ROI). Robot speed can be dramatically increased with the Fabhp-v 300 robot, often resulting in tool throughput improvements of 5-25%.

Elbow/Lower Arms

  • Precision-machined components and pressed-fit bearings create a tighter, stronger design that reduces bearing wear and eliminates droop.
  • Bearings are enclosed to prevent particle contamination.
  • Patented split lower-arm design automatically compensates for misalignment of the hub’s magnetic rings to eliminate premature bearing failure and ensure smooth operation.

Wrists

  • Design eliminates any wrist preventive maintenance (PM) and wrist-related droop.
  • Patented interconnected stainless steel bands replace interlocking pivot gears with anti-backlash springs to eliminate side-to-side motion.
  • Ceramic bearings are used for long life and are enclosed to protect from process deposition and prevent particle contamination.
  • End effector leveling adjustments are performed at the wrist for greater alignment accuracy and faster setup/teach time.

Hub Bearings

  • Hybrid ceramic bearings with hardened 440 stainless steel races provide long life and reduce particle generation.
  • Bearing shields help retain lubricant to further reduce particles.

End Effector

Fabworx end effectors are available in stress-free 6061 bare aluminum, or anodized aluminum. Fabworx will work hand-in-hand with the customer to select the appropriate end effector for the process type.

 

Fabworx also offers a Fabhp-v 300 for 300mm RTP applications to improve reliability, contamination, and repeatability/accuracy. Smooth operation may also allow for tool throughput gain.

The Fabhp-v 300 RTP offers the same performance improvements as the Fabhp-v 300, and is designed to be compatible with the customer's existing quartz end effector. End effector leveling adjustments are performed at the wrist for greater alignment accuracy and faster setup/teach time. 



Patented with Additional Patents Pending

 

Endura® and Centura® are registered trademarks of Applied Materials, Inc.