Fabhp-hdp

The Fabworx Fabhp-hdp robot was designed to improve yield and productivity in 150mm and 200mm Centura® platforms that require an extended reach, such as HDP tools.

Robot speed can be dramatically increased with the Fabhp-hdp robot, often resulting in tool throughput improvements of 5-25%. 

Elbow/Lower Arm

  • Precision-machined components and pressed-fit bearings create a tighter, stronger design that reduces bearing wear and eliminates droop.
  • Bearings are enclosed to prevent particle contamination.
  • Patented split lower-arm design automatically compensates for misalignment of the hub’s magnetic rings to eliminate premature bearing failure and ensure smooth operation.

Wrist

  • Design eliminates any wrist preventive maintenance (PM) and wrist-related droop.
  • Patented interconnected stainless steel bands replace interlocking pivot gears with anti-backlash springs to eliminate side-to-side motion.
  • Ceramic bearings are used for long life and are enclosed to protect from process deposition and prevent particle contamination.
  • End effector leveling adjustments are performed at the wrist for greater alignment accuracy and faster setup/teach time.

Hub Bearings/Components

  • Hybrid ceramic bearings provide long life and reduce particle generation.
  • Integral bearing shields increase race stiffness and help retain lubricant to further reduce particles.
  • Patented stainless steel hub spacers are pinned together to eliminate lateral movement and provide greater stiffness against twisting and distorting.
  • Overall spring force is increased seven times to keep hub assembly vertically aligned, ensure bearing stability, and reduce robot droop.
  • Special brackets lock upper and lower motors in place to eliminate jumping and twisting, improve wafer placement repeatability, and reduce motor sync errors.

End Effector

  • Designed to use the existing OEM quartz or ceramic blade, or a Fabworx end effector with perfluoroelastomer o-rings.
  • Fabworx end effectors are available in stress-free 6061 bare aluminum, anodized aluminum, or thin-profile molybdenum for maximum clearance in the cassette. Fabworx will work hand-in-hand with the customer to select the appropriate end effector for the process type.


Patented with Additional Patents Pending


Endura® and Centura® are registered trademarks of Applied Materials, Inc.