End effectors

Fabworx Solutions offers end effectors that are compatible with Fabworx robots, as well as a line of original equipment manufacturer (OEM) wrist-compatible end effectors designed to improve the performance of your existing tools.

  • 150mm, 200mm and 300mm end effectors are available.
  • Three replaceable perfluoroeslastomer o-rings with a patented o-ring mounting system provide exceptional coefficient of friction to eliminate wafer sliding and associated particles.
  • Location of o-rings removes the topographical stress normally caused by wafer bowing when a wafer is supported by its outside diameter.
  • Available in designs suitable for the buffer or transfer chamber.

Fabworx end effectors are available in stress-free 6061 aluminum, alumina-ceramic coatings, and ultra-thin molybdenum.

 

End effectors made of molybdenum (moly) offer maximum clearance in the cassette.

  • Fabworx moly blades have a thickness of only 0.045 in (1.14mm) compared to the standard 0.120 in (3.05mm) OEM end effector.
  • Stronger and more durable than thin-profile ceramic blades.
  • O-ring system for thin profile end effectors provides exceptional coefficient of friction to eliminate wafer sliding and associated particles.