300mm wrist assembly

The Fabworx 300mm wrist assembly is an upgrade to the original equipment manufacturer (OEM) 300mm robot and is designed to improve yield and productivity in Endura® and Centura® platforms.

  • Patented interconnected stainless steel bands replace interlocking pivot gears, improving reliability and wafer placement repeatability.
  • Preventive maintenance (PM) is eliminated.
  • Ceramic bearings are used for long life.
  • Bearings are enclosed to protect from process deposition and prevent particles from entering the process environment.
  • Compatible with the OEM or Fabworx end effector.
  • End effector leveling adjustments are performed at the wrist for greater alignment accuracy and faster setup time when used with a Fabworx end effector.
  • Includes a 2 year warranty.

Wrist assemblies are available for 300mm XP®, VHP® and VHP RTP robots.

Patented with Additional Patents Pending

Endura®, Centura®, XP® and VHP® are registered trademarks of Applied Materials, Inc.