Fabworx offers an array of robots, robotic components, and chamber components for 300mm, 200mm, and 150mm fabs. With solutions for CVD, PVD, Epi, Etch, and RTPpro
Fabworx offers an array of robots, robotic components, and chamber components for 300mm, 200mm, and 150mm fabs. With solutions for CVD, PVD, Epi, Etch, and RTPpro
Fabworx offers an array of robots, robotic components, and chamber components for 300mm, 200mm, and 150mm fabs. With solutions for CVD, PVD, Epi, Etch, and RTPpro
innovative hardware solutions for your semiconductor fab
Fabworx is an Austin, Texas, based design and manufacturing firm specializing in yield and productivity improvement products for 300mm, 200mm, and 150mm semiconductor fabrication customers worldwide. Our talents span a diverse range of disciplines, with special emphasis on process tool robotics and automation. With a fifteen year record of success, our expertise in wafer handling and particle reduction aspects of semiconductor manufacturing allows us to bring unrivaled benefits to our customers.
Our Focus
Our Approach
Our Solution
Wafer handling and hardware-based yield and productivity issues
Collaborate with our customers, develop products to support their needs
Using root-cause engineering, design and manufacture upgraded replacement parts that improve overall tool performance